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Liquid Flow Control for Advanced CVD Processes
Designed for Use with New MSP Turbo II™ Vaporizers
Built upon field proven technology, the Turbo™ Liquid Flow Controller (LFC) 2950 was engineered to pair with MSP Turbo II™ Vaporizers to provide a reliable, high-performance liquid vapor delivery solution for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD). The diagram below shows how the LFC fits into the liquid vaporization system MSP offers.
View the MSP Turbo™ LFC Brochure
View the MSP Turbo™ LFC Spec Sheet
The MSP Turbo™ Liquid Flow Controller provides ultra-fast response time – able to reach ±1% of set point within 300 ms, saving time and money by increasing throughput and reducing waste. Our new LFC also offers best-in-class accuracy, repeatability, and stability – delivering the high precision performance needed for 300 mm microelectronic processes. High accuracy, excellent repeatability and exception stability can reduce chamber/tool variation, allowing more tightly controlled processes leading to better yield.
The new MSP Turbo™ Liquid Flow Controller allows you to change the liquid you are vaporizing without needing to send the LFC back to the manufacturer for recalibration. While factory calibration is still the best option for the best accuracy, field adjustment provides a quick repeatable measurement – helping to speed up your development process and reduce the number of LFCs you need to invest in.
The speed of our 2950 LFC enables good response time performance using less aggressive PID settings. This means the MSP Turbo™ LFC doesn’t require PID tuning for every process change, and when it is required, PID adjustments are easier to make.
The “out of the box” PID values can be used for a wide range of set points and process conditions without needing to be changed and while still getting to set point within ~2 seconds. If your application does require ultra-fast response, adjusting the PID is easy with our user software.
With full scale units available from 200 mg to 40 g/min, the MSP Turbo LFC can provide the liquid flow control performance you need across a wide range of applications.
The new LFC also offers improved communications options, including: EtherCAT1, RS485, and a variety of analogue options.
1ETG.5003.2020 S (R) V1.1.0 Compliant.
The high-precision flow control loop of the 2950 LFC was based on the sophisticated 2940 LFC flow control loop; the 2940 LFC was extensively field tested in 300mm microelectronic applications for over a decade. This history ensures the 2950 LFC meets the needs of the highly specialized, demanding semiconductor industry.
Additionally, the 2950 provides enhanced protection from environmental variability versus other commercially available solutions – meaning that even if the ambient environment changes, the LFC’s measurements will remain accurate, and your process with remain in-control.
9-pin D connector (male)
*For complete set of specification details download the data sheet or the brochure.
Use our interactive product selector to find the right vapor delivery solution for your CVD thin film application.
♦Nominal max flow determined using TEOS as reference liquid at 23±2°C. Flow rate range is a function of specified liquid.
Are you using a liquid other than the ones outlined above? Estimate the 2950 Turbo LFC full scale value of your chosen liquid (a function of liquid viscosity (µLiquid(cP))) to correctly determine your LFC model. To estimate the full scale (F.S.) of each model for your liquid, use one of the equations below:
If µLiquid(cP) ≥ 0.65: F.S.Other Liquid = F.S.TEOS*0.65cP/µLiquid(cP)
If µLiquid(cP) < 0.65: F.S.Other Liquid = F.S.TEOS*µLiquid(cP)/0.65cP
f you would like assistance determining which model is right for you, please submit an RFQ for any of the models above and note your question in the comment box. Someone will get back to you shortly.
TEOS Full Scale* (g/min): 30
TEMAZr Full Scale (g/min): 5.7
TEOS Full Scale* (g/min): 20
TEMAZr Full Scale (g/min): 3.8
TEOS Full Scale* (g/min): 10
TEMAZr Full Scale (g/min): 1.9
TEOS Full Scale* (g/min): 5
TEMAZr Full Scale (g/min): 0.95
TEOS Full Scale* (g/min): 1
TEMAZr Full Scale (g/min): 0.19
TEOS Full Scale* (g/min): 0.2
TEMAZr Full Scale (g/min): 0.038