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5000 Series Digital Flow Meters

Our All-In-One Flow Meter

Built upon proven TSI flow sensor technology, the 5000 Series Flow Multi-Meter redefines what a flow meter can do for you. This all-in-one gas mass flow meter simplifies your work by eliminating the need for multiple instruments and is flexible enough to fit your unique application. The 5000 Series offers a mix of models with varying features and functionality.

Use our interactive product selector to find the inline flow meter that is right for your application!

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Basic and Advanced Models

All TSI gas mass flow meters integrate flow, absolute pressure, and temperature sensors to deliver readings and compensate flow measurements. All of our 5000 Series models also incorporate bidirectional flow sensing, color touchscreen display, configurable tube end adapters and companion FLO-SightTM PC software

Advanced 5000 Series Flow Meter models can simultaneously measure flow rate, absolute pressure, temperature, volume, differential pressure, and humidity in a single, compact device. Additional models include options for higher flow accuracy, data logging, humidity compensation, or a wide flow accuracy specification. See the Model Guide below to find model that will work best for your application!

View all our learning materials and resources for TSI's 5000 Series Flow Meters:

Go to Resources Page

Calibration and Service

We offer calibrations for: Air, O2, and CO2, and all Air flow meters include a nitrogen correction. Looking to calibrate your TSI inline flow meter? TSI now offers worldwide service! To find out about our service, calibration, and repair options, visit our Flow Service page. All calibration services come with a NIST-traceable calibration certificate included.

Gas Mass Flow Meter Model Guide

Base Models:

Our 5000 Series Flow Meters Base Models provide:

  • Flow and Totalizer Measurements
  • Temperature and Absolute Pressure Measurements
Base Models Air, N2 Air, O2, N2 Air, CO2, N2 O2 CO2
±30 L/min 5200-1 5200-2 5200-3 5200-6 5200-7
±300 L/min 5300-1 5300-2 5300-3 5300-4 5300-5


Advanced Models:

Our 5000 Series Flow Meters Advanced Models provide all the features the Base Models include, as well as:

  • Volume Measurements (displayed on the touchscreen)
  • Differential Pressure Measurements
  • Data Logging
Advanced Models Air, N2 Air, O2, N2 Air, CO2, N2 O2 CO2
±30 L/min 5210-1 5210-2 5210-3 5210-6 5210-7
±300 L/min 5310-1 5310-2 5310-3 5310-4 5310-5


Humidity Models:

Our 5000 Series Flow Meters Humidity Models provide all the features the Advanced Models include, as well as:

  • Relative Humidity Measurements
  • Humidity Compensation of the Air Flow Measurement
Humidity Models Air, N2 Air, O2, N2 Air, CO2, N2 O2 CO2
±30 L/min   5220-2      
±300 L/min   5320-2      


High Accuracy Models:

Our 5000 Series Flow Meters High Accuracy Models provide all the features the Humidity Models include, as well as:

  • Higher Accuracy (1.7% of reading)
  • Tabletop Stand Accessory
High Accuracy Models Air, N2 Air, O2, N2 Air, CO2, N2 O2 CO2
±30 L/min   5230-2      
±300 L/min   5330-2      


High Flow and Low Flow Options

The 5300 Series is TSI’s high flow thermal mass flow meter. The 5300 Series can measure up to 300 Std L/min while maintaining a low pressure drop.  These flow meters are lightweight and compact, especially when compared to other instruments that measure similar flow rates.

The 5200 Series is TSI’s low flow thermal mass flow meter. These flow meters can measure up to 30 Std L/min and provide increased resolution at flow rates under 1 Std L/min. The 5200 Series flow meters are designed with reduced internal volume to minimize circuit dead space and deliver highly accurate volume measurements.

Features and Benefits

  • 4 millisecond bi-directional flow response
  • High accuracy (±2% of reading, ±1.7% of reading optional)
  • Low pressure drop minimizes back pressure
  • Wide dynamic operating range (1000:1 turndown ratio)
  • Multiple gas calibrations available, user-selectable
  • Measure up to 6 parameters with a single instrument - flow rate, absolute pressure, temperature, volume, differential pressure, and humidity
  • Temperature and pressure compensated flow measurements, optional humidity compensation
  • 2.8 inch color touchscreen operation
  • Display four measurement parameters simultaneously
  • Configurable tube end connectors
  • Data logging options
  • USB power and data communications
  • NIST-traceable Calibration Certificate included
  • All meters come with power supply, cables, tube end connectors, inlet filter, and FLO-Sight companion PC software

Air / Oxygen Gas Mass Flow Meter (plus Kit) 5330-2

$1895.00 USD

Range: 0 to ± 300 Std L/min Accuracy: 1.7% of reading Calibration: Air, O2, N2...

Air / Oxygen Gas Mass Flow Meter (plus Kit) 5320-2

$1695.00 USD

Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: Air, O2, N2* Includes...

CO2 Gas Mass Flow Meter (plus Kit) 5310-5

$1495.00 USD

Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: CO2 Includes Standard...

Oxygen Gas Mass Flow Meter (plus Kit) 5310-4

$1495.00 USD

Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: O2 Includes Standard...

Air / CO2 Gas Mass Flow Meter (plus Kit) 5310-3

$1495.00 USD

Range: 0 to ±@300 Std L/min Accuracy: 2% of reading Calibration: Air, CO2, N2* Includes...

Air / Oxygen Gas Mass Flow Meter (plus Kit) 5310-2

$1495.00 USD

Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: Air, O2, N2* Includes...

Air Gas Mass Flow Meter (plus Kit) 5310-1

$1445.00 USD

Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: Air, N2* Includes...

Air / Oxygen Gas Mass Flow Meter (plus Kit) 5303-2

$1295.00 USD

Range: 0 to ± 300 Std L/min Accuracy: 3% of reading Calibration: Air, O2, N2* Includes...

CO2 Gas Mass Flow Meter (plus Kit) 5300-5

$1295.00 USD

Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: CO2 Includes Standard...

Oxygen Gas Mass Flow Meter (plus Kit) 5300-4

$1295.00 USD

Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: O2 Inlcudes Standard...

Air / CO2 Gas Mass Flow Meter (plus Kit) 5300-3

$1295.00 USD

Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: Air, CO2, N2* Includes...

Air / Oxygen Gas Mass Flow Meter (plus Kit) 5300-2

$1295.00 USD

Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: Air, O2, N2* Includes...

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