Product Details
High Pressure Diffuser, 2-Stage, 1.0 cfm
Features and benefits
- Reduces gas pressure of up to 120 psi (8.27 bar) to near atmospheric pressure
- For monitoring and testing to ISO 8573-1 and SEMI E49.8 limits
- Compatible with 1.0 cfm AeroTrak Particle Counters (both remote and portable models)
- Exhaust HEPA filter protects HPD accessory from contamination when disconnected from compressed gas source
- Includes bleed air injection for use with low-humidity compressed gas systems
- No manual adjustments or calibration required
- For use with Clean Dry Air (CDA), Nitrogen (N2) and Argon (Ar)
- Passivated stainless steel enclosure resists cleanroom chemicals
- 1.0 cfm (28.3 lpm) nominal flow rate