Qual-Dep™ Reticle Qualification Contamination Standards are crafted to precise customer specifications, often following initial development using Dev-Dep™ Development Contamination Standards. These standards offer customizable attributes for each deposit on your reticle, including:
- Deposit Pattern Type
- Deposit Size and Position
- Particle Material
- Particle Size
- Particle Count
Applications
- Reticle inspection tool qualification
- Reticle inspection tool traceable calibration
- Inspection tool performance matching
Substrates
Deposits can be applied to various substrates, with a focus on reticles (photomasks). While customers often supply their own reticles, MSP also offers optical photomask blanks. Our services ensure precise deposition on customer-provided reticles, meeting specific requirements for defect inspection and quality control.
| Substrate Type | MSP-Supplied Substrate Sizes | Customer-Supplied Substrate Sizes |
|---|---|---|
| Optical Reticle (Photomask) | 6 inch x 6 inch x 1/4 inch (Blank Only) | 6 inch x 6 inch x 1/4 inch (All Types) |
| EUV Reticle (Photomask) | N/A | 6 inch x 6 inch x 1/4 inch (All Types) |
| Pellicle | N/A | TBD* |
Customizable Deposits
Our Reticle Qual-Dep™ Qualification Contamination Standards are tailored to customer specifications, often following initial development with Dev-Dep™ Development Contamination Standards. Customizable attributes for each deposit include:
- Deposit Pattern Type: Spot, Full, Arc, Ring
- Particle Material:
- PSL Spheres (Size Standards)
- SiO2 Spheres (including MSP NanoSilica™ Size Standards)
- MSP Process Particles™ Suspensions (e.g., AlF3, Al2O3, Si, SiO2, TiO2, W)
- Particle Size: 10 nm – 20 μm (varies by particle type/material)
- Particle Count: Minimum 100 particles per deposit
- Pattern Width: Typically 10-30 mm (dependent on particle size)
- Pattern Location: Specific to substrate
Features & Benefits
Qual-Dep™ Reticle Qualification Contamination Standards offer several advantages:
- Exclusivity: Each standard has a unique part number, ensuring specific specifications and simplifying the ordering process.
- Supply Chain Integration: MSP works with your supply chain to streamline purchasing, reduce substrate transport, and speed up delivery.
- Record Management: We meticulously track deposition recipes and monitor key parameters to ensure quality and traceability.
- Flexible Terms: MSP negotiates tailored terms for quantity, pricing, and lead times to meet your needs.
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