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Turbo-Vaporizer 2840PE

UGS: 2840PE

*Merci de noter que cette page est disponible en anglais uniquement.*

The 2840PE Turbo-Vaporizer™ is one of our smallest vaporizers and has the state-of-the art PE atomizer with on-board flow control. This model has been optimized for low flow applications; featuring an ultra-fast response time making it a great choice for ALD applications.

Détails du produit

Dimensions

290 mm x 84 mm x 109 mm (11.4 in. x 3.3 in. x 4.3 in.)

Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
Liquid Inlet 1/8 in. VCR female
Vapor Outlet 1/4 in. VCR female
Compressed Air 4 mm instant tube fitting
Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy®
Leak Integrity <1 x 10-9 scc/sec Helium
Heater Power Requirements 110 VAC, 60 Hz, 300W
Carrier Gas Inert gas recommended
Gas Inlet Pressure Range 0–80 psig inlet pressure
Max Carrier Gas Flow* N2 15 standard L/min**
Max. Liquid Flow* TEOS equivalent 720 g/hr
Max. Liquid Flow* DI Water 60 g/hr
System Pressure Limit 120 psig
Compressed Air 90 to 110 psi
Temperature Range 40°C to 200°C
Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor Type K thermocouple

Specifications subject to change without notice
* Liquid and gas flow ranges are affected by liquid and gas type
** Standard model up to 7 standard L/min; up to 15 standard L/min available

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