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Turbo-Vaporizer 2820

UGS: 2820

*Merci de noter que cette page est disponible en anglais uniquement.*

The 2820 Turbo-Vaporizer™ is a classic system. This model is a great choice for easy to vaporize precursors, and features wide internal channels to minimize clogging.

Détails du produit


224 mm x 183 mm x 140 mm (8.8 in. x 7.2 in. x 5.5 in.)

Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
Liquid Inlet 1/8 in. VCR female
Vapor Outlet 1/2 in. VCR female
Wetted Parts SS 316, Viton
Leak Integrity <1 x 10-9 scc/sec Helium
Heater Power Requirements 120 VAC, 60 Hz, 300W
Carrier Gas Inert gas recommended
Gas Inlet Pressure Range 0–80 psig inlet pressure
Max. Carrier Gas Flow Rate* N2 20 standard L/min
Max. Liquid Flow* TEOS equivalent 600 g/hr
Max. Liquid Flow* DI Water 60 g/hr
System Pressure Limit 120 psig
Temperature Range 40°C to 200°C
Temperature Sensor Type K thermocouple

Specifications subject to change without notice
* Liquid and gas flow ranges are affected by liquid and gas type