Vaporizers

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Better Vaporization – More Process Options

Vaporizers are used in gas phase processes to transition a liquid into a gas for thin film deposition or other processes that require a vapor (metal etch, doped epitaxial growth, etc). Vaporizers are widely used in:

• CVD (Chemical Vapor Deposition)
• PECVD (Plasma-Enhanced Chemical Vapor Deposition)
• MOCVD (Metal-Organic Chemical Vapor Deposition)
• ALD (Atomic Layer Deposition)

Wider Process Window. Improved Film Quality. Less Maintenance.

MSP’s Turbo-Vaporizers™ use a droplet vaporization, direct liquid injection technique. Our vaporizers use advanced technology in aerosol science and thermo-dynamics to create a more refined solution to vaporizing liquids.

In thin film applications, our Turbo-Vaporizers’ stable and uniform vapor leads to a higher quality thin film and higher wafer yields with less down time. MSP’s Vaporizers provide faster response time, high precision flow control, and are able to operate at high temperatures.

Features and Benefits:

• Extremely stable concentration output
• Low temperature vaporization/reduced risk of thermal decomposition
• Longer Mean Time Between Repair (MTBR)
• Ability to vaporize difficult precursors
• Direct liquid injection - vapor on demand
• Higher vapor concentration potential
• Clog-resistant design

Applications include:

• Semiconductor Microelectronics
• LEDs Optoelectronics
• Protective Coatings
• Nanoparticle Synthesis
• Energy Production/Storage
• Powder/Fiber Processing
• Solar Photovoltaic
• Medical Device
• Bio Assays

Turbo-Vaporizer 2860PE

*Merci de noter que cette page est disponible en anglais uniquement.*The 2860PE was designed as a...

Turbo-Vaporizer 2841PE

*Merci de noter que cette page est disponible en anglais uniquement.*The 2841PE Turbo-Vaporizer...

Turbo-Vaporizer 2840PE

*Merci de noter que cette page est disponible en anglais uniquement.*The 2840PE Turbo-Vaporizer...

Turbo-Vaporizer 2821

*Merci de noter que cette page est disponible en anglais uniquement.*The 2821 Turbo-Vaporizer...

Turbo-Vaporizer 2820D

*Merci de noter que cette page est disponible en anglais uniquement.*The 2820D Turbo-Vaporizer...

Turbo-Vaporizer 2820

*Merci de noter que cette page est disponible en anglais uniquement.*The 2820 Turbo-Vaporizer...

Turbo-Vaporizer 2801PE

*Merci de noter que cette page est disponible en anglais uniquement.*The 2801PE Turbo-Vaporizer...

Turbo-Vaporizer 2800PE

*Merci de noter que cette page est disponible en anglais uniquement.*The 2800PE Turbo-Vaporizer...

Turbo-Vaporizer 2800

*Merci de noter que cette page est disponible en anglais uniquement.*The 2800 Turbo-Vaporizer...