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Whether testing for particle size, count, or composition, it is imperative to use reliable particle suspensions to calibrate your surface scanning equipment or particle counters. A particle standard consists of a specific size range and number concentration of solid particles suspended in ultra-pure water (UPW). This suspension is dispersed into clean air or nitrogen and deposited onto wafers and reticles in specific patterns and sizes.

Particle Standards are used to produce high-quality calibration standards for calibrating, qualifying, and monitoring the performance of wafer and photomask inspection systems.

MSP particle suspensions are available in two categories:

• NanoSilica™ Size Standards |  Concentrated suspensions of amorphous SiO₂ particles with highly uniform size distributions, suspended in ultra-pure water (UPW)
• Process Particles™ Suspensions |  Broad size distributions of irregularly shaped solid particles suspended in ultra-pure water (UPW)

Process Particles Suspensions

NanoSilica Size Standards