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Liquid source vaporization and vapor delivery are critical steps in many CVD thin film deposition processes in microelectronic (CVD and ALD) and industrial (diamond-like coatings and SiC-based) applications. Improving your liquid delivery solution can increase throughput, increase yield and decrease maintenance costs.
Choosing the right components for your CVD tool is important, as different applications may require different hardware to optimize performance. Some of the process variables that need to be considered include:
MSP’s new vapor delivery product selector will walk you through these variables, while also explaining a little about each. Our interactive product selector allows you to select the features you need in your vaporizer, liquid flow controller, and filter