Product Details
Dimensions | 296 mm x 173 mm x 121 mm (11.6 in. x 6.8 in. x 4.7 in.) | |
Fittings (on the unit) | Carrier Gas Inlet | 1/4 in. VCR female split nut |
Liquid Inlet | 1/8 in. VCR female | |
Vapor Outlet | 1/2 in. VCR female | |
Compressed Air | 4 mm instant tube fitting | |
Wetted Parts | SS 316, PEEK, PCTFE, Elgiloy®, FFKM, PTFE | |
Leak Integrity | ≤ 1x 10-9 Pa·m3/s (He) | |
Heater Power Requirements |
120 VAC1, 60 Hz, 300W |
|
Carrier Gas | Inert gas recommended | |
Max Carrier Gas Flow1 |
7.0 standard liters/min N2 at 80 psig |
|
Max Liquid Flow2 | 900 g/hr (TEOS equivalent) 90 g/hr (H2O or equivalent) |
|
System Pressure Limit | 150 psig | |
Compressed Air | 90 to 110 psig | |
Temperature Range | 40°C to 160°C 160°C to 200°C with optional piezo cooling package |
|
Vaporizer Body | Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction | |
Temperature Sensor | 2 Type K thermocouples |
Specifications subject to change without notice
1 Max Carrier Gas Flow Rate is adjustable; visit www.tsi.com/contact to request more information.
2 Max liquid flow is process dependent. The spec assumes a vaporizer temperature of 180° C or higher. N2 carrier gas ≥4.5 SLPM, and pressure <10 Torr immediately downstream of the vaporizer.