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蒸汽工艺气体 (VPG) 过滤器


蒸汽工艺气体 (VPG) 过滤器


Filters are an integral piece of your vaporizing system. Conventional high-purity, point-of-use gas filters are used in compressed gas lines for particle removal. In contrast, MSP’s VPG filter is generally used downstream of a vaporizer under vacuum flow conditions.

Our VPG filter removes nanometer and micron sized particles from the gas/vapor mixture using a carrier gas, preventing the unwanted particles from being mixed with a chemical precursor vapor for ALD (atomic layer deposition) and CVD (chemical vapor deposition) applications.

Ultra-high efficiency. Extremely low pressure drop. 100% 316 stainless steel.

These patent-protected specialized filters were designed to have an extremely low pressure drop, making it easier to work in an ultra-low pressure environment and reducing the risk of gas phase reactions occurring in the filter.

MSP’s vapor/gas filters are chemically and thermally resistant, have a long filter life, and provide up to twelve 9s of efficiency at 2.5 nm (99.9999999999% @ 1 standard L/min).

Tubing and components downstream of the vaporizer need to be heat-wrapped to prevent condensation. The solid stainless steel core in our cross-flow design filters provides additional heat exposure acting as a second stage heat exchanger.

Nano-filtration media.

The Nano-Filtration Media used in our VPG-A6 is comprised of sintered stainless steel fibers of a homogeneous construction with efficiency and pressure drop capabilities not previously attainable by conventional sintered powder media construction.

VPG-A3 Inline Filter

Filtration down to 2@nm and below

VPG-A6 Inline Filter

Filtration down to 2@nm and below

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