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Vaporizers
Better Vaporization – More Process Options
Vaporizers are used in gas phase processes to transition a liquid into a gas for thin film deposition or other processes that require a vapor (metal etch, doped epitaxial growth, etc). Vaporizers are widely used in:
MSP Turbo™ Vaporizers use a droplet vaporization, direct liquid injection technique. Our vaporizers (also known as liquid source bubblers or CVD bubblers) use advanced technology in aerosol science and thermo-dynamics to create a more refined solution to vaporizing liquids.
In thin film applications, MSP Turbo™ Vaporizers’ stable and uniform vapor leads to a higher quality thin film and higher wafer yields with less down time. MSP Turbo™ Vaporizers provide faster response time, high precision flow control, are able to operate at high temperatures, and are built with a clog-resistant design.
Use our interactive product selector to find the right vapor delivery solution for your CVD thin film application.
Learn more by downloading our white paper on reducing CVD defects with post-vaporization filtration
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The 2860PE MSP Turbo™ Vaporizer was designed as a drop-in replacement for poorly...
The 2841PE MSP Turbo™ Vaporizer was designed for high flow water vapor. This model has...
The 2840PE MSP Turbo™ Vaporizer is one of our smallest vaporizers and has the state-of...
The 2821 MSP Turbo™ Vaporizer is our highest liquid flow rate unit. This model features...
The 2820D MSP Turbo™ Vaporizer has dual liquid inlets, making it a good choice for...
The 2820 MSP Turbo™ Vaporizer is a classic system. This model is a great choice for easy...
The 2801PE MSP Turbo™ Vaporizer was designed for high flow, expansive vapors, making it...
The 2800PE MSP Turbo™ Vaporizer is a great all around vaporizer and works well for most...
The 2800 MSP Turbo™ Vaporizer can be operated at temperatures up to 300°C, making it...