蒸发器

Vaporizers are used in gas phase processes to transition a liquid into a gas for thin film deposition or other processes that require a vapor (metal etch, doped epitaxial growth, etc). Vaporizers are widely used in:

CVD (Chemical Vapor Deposition)
PECVD (Plasma-Enhanced Chemical Vapor Deposition)
MOCVD (Metal-Organic Chemical Vapor Deposition)
ALD (Atomic Layer Deposition)

Wider Process Window. Improved Film Quality. Less Maintenance.

MSP Turbo™ Vaporizers use a droplet vaporization, direct liquid injection technique. Our vaporizers (also known as liquid source bubblers or CVD bubblers) use advanced technology in aerosol science and thermo-dynamics to create a more refined solution to vaporizing liquids.

In thin film applications, MSP Turbo™ Vaporizers’ stable and uniform vapor leads to a higher quality thin film and higher wafer yields with less down time. MSP Turbo™ Vaporizers provide faster response time, high precision flow control, are able to operate at high temperatures, and are built with a clog-resistant design.

Find your Vaporizer

Use our interactive product selector to find the right vapor delivery solution for your CVD thin film application.

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Features and Benefits:

Extremely stable concentration output
Low temperature vaporization/reduced risk of thermal decomposition
Longer Mean Time Between Repair (MTBR)
Ability to vaporize difficult precursors
Direct liquid injection - vapor on demand
Higher vapor concentration potential
Clog-resistant design

Applications include:

Semiconductor Microelectronics
LEDs Optoelectronics
Protective Coatings
Nanoparticle Synthesis
Energy Production/Storage
Powder/Fiber Processing
Solar Photovoltaic
Medical Device
Bio Assays

Filters are an important part of reducing CVD defects

Learn more by downloading our white paper on reducing CVD defects with post-vaporization filtration

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Turbo-Vaporizer 2860PE
The 2860PE MSP Turbo™ Vaporizer was designed as a drop-in replacement for poorly...

Turbo Vaporizer 2841PE
The 2841PE MSP Turbo™ Vaporizer was designed for high flow water vapor. This model has...

Turbo Vaporizer 2840PE
The 2840PE MSP Turbo™ Vaporizer is one of our smallest vaporizers and has the state-of...

Turbo Vaporizer 2821
The 2821 MSP Turbo™ Vaporizer is our highest liquid flow rate unit. This model features...

Turbo Vaporizer 2820D
The 2820D MSP Turbo™ Vaporizer has dual liquid inlets, making it a good choice for...

Turbo Vaporizer 2820
The 2820 MSP Turbo™ Vaporizer is a classic system. This model is a great choice for easy...

Turbo Vaporizer 2801PE
The 2801PE MSP Turbo™ Vaporizer was designed for high flow, expansive vapors, making it...

Turbo Vaporizer 2800PE
The 2800PE MSP Turbo™ Vaporizer is a great all around vaporizer and works well for most...

Turbo Vaporizer 2800
The 2800 MSP Turbo™ Vaporizer can be operated at temperatures up to 300°C, making it...