Better Vaporization – More Process Options



Vaporizers are used in gas phase processes to transition a liquid into a gas for thin film deposition or other processes that require a vapor (metal etch, doped epitaxial growth, etc). Vaporizers are widely used in:

  • CVD (Chemical Vapor Deposition)
  • PECVD (Plasma-Enhanced Chemical Vapor Deposition)
  • MOCVD (Metal-Organic Chemical Vapor Deposition)
  • ALD (Atomic Layer Deposition)

Wider Process Window. Improved Film Quality. Less Maintenance.

MSP Turbo™ Vaporizers use a droplet vaporization, direct liquid injection technique. Our vaporizers (also known as liquid source bubblers or CVD bubblers) use advanced technology in aerosol science and thermo-dynamics to create a more refined solution to vaporizing liquids.

In thin film applications, MSP Turbo™ Vaporizers’ stable and uniform vapor leads to a higher quality thin film and higher wafer yields with less down time. MSP Turbo™ Vaporizers provide faster response time, high precision flow control, are able to operate at high temperatures, and are built with a clog-resistant design.

Find your Vaporizer

Use our interactive product selector to find the right vapor delivery solution for your CVD thin film application.

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Features and Benefits:

  • Extremely stable concentration output
  • Low temperature vaporization/reduced risk of thermal decomposition
  • Longer Mean Time Between Repair (MTBR)
  • Ability to vaporize difficult precursors
  • Direct liquid injection - vapor on demand
  • Higher vapor concentration potential
  • Clog-resistant design

Applications include:

  • Semiconductor Microelectronics
  • LEDs Optoelectronics
  • Protective Coatings
  • Nanoparticle Synthesis
  • Energy Production/Storage
  • Powder/Fiber Processing
  • Solar Photovoltaic
  • Medical Device
  • Bio Assays

Filters are an important part of reducing CVD defects

Learn more by downloading our white paper on reducing CVD defects with post-vaporization filtration


High-Flow Turbo II Vaporizer 2855PE

MSP's Turbo II™ Vaporizer 2855PE is designed for high-precision microelectronic...

High-Flow Turbo II Vaporizer 2855NP

MSP's Turbo II™ Vaporizer 2855NP is designed for applications that require mid...

Low-Flow Turbo II Vaporizer 2852PE

MSP's Turbo II™ Vaporizer 2852PE is designed for high-precision microelectronic...

Low-Flow Turbo II Vaporizer 2852NP

MSP's Turbo II™ Vaporizer 2852NP is designed for applications that require low to...

Turbo Vaporizer 2821

The 2821 MSP Turbo™ Vaporizer is our highest liquid flow rate unit. This model features...

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