蒸发器

Vaporizers are used in gas phase processes to transition a liquid into a gas for thin film deposition or other processes that require a vapor (metal etch, doped epitaxial growth, etc). Vaporizers are widely used in:

• CVD (Chemical Vapor Deposition)
• PECVD (Plasma-Enhanced Chemical Vapor Deposition)
• MOCVD (Metal-Organic Chemical Vapor Deposition)
• ALD (Atomic Layer Deposition)

Wider Process Window. Improved Film Quality. Less Maintenance.

MSP Turbo™ Vaporizers use a droplet vaporization, direct liquid injection technique. Our vaporizers (also known as liquid source bubblers or CVD bubblers) use advanced technology in aerosol science and thermo-dynamics to create a more refined solution to vaporizing liquids.

In thin film applications, MSP Turbo™ Vaporizers’ stable and uniform vapor leads to a higher quality thin film and higher wafer yields with less down time. MSP Turbo™ Vaporizers provide faster response time, high precision flow control, are able to operate at high temperatures, and are built with a clog-resistant design.

Find your Vaporizer

Use our interactive product selector to find the right vapor delivery solution for your CVD thin film application.

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Features and Benefits:

• Extremely stable concentration output
• Low temperature vaporization/reduced risk of thermal decomposition
• Longer Mean Time Between Repair (MTBR)
• Ability to vaporize difficult precursors
• Direct liquid injection - vapor on demand
• Higher vapor concentration potential
• Clog-resistant design

Applications include:

• Semiconductor Microelectronics
• LEDs Optoelectronics
• Protective Coatings
• Nanoparticle Synthesis
• Energy Production/Storage
• Powder/Fiber Processing
• Solar Photovoltaic
• Medical Device
• Bio Assays

Filters are an important part of reducing CVD defects

Learn more by downloading our white paper on reducing CVD defects with post-vaporization filtration

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Turbo-Vaporizer 2860PE

The 2860PE MSP Turbo™ Vaporizer was designed as a drop-in replacement for poorly performing...

Turbo Vaporizer 2841PE

The 2841PE MSP Turbo™ Vaporizer was designed for high flow water vapor. This model has the...

Turbo Vaporizer 2840PE

The 2840PE MSP Turbo™ Vaporizer is one of our smallest vaporizers and has the state-of-the...

Turbo Vaporizer 2821

The 2821 MSP Turbo™ Vaporizer is our highest liquid flow rate unit. This model features...

Turbo Vaporizer 2820D

The 2820D MSP Turbo™ Vaporizer has dual liquid inlets, making it a good choice for research...

Turbo Vaporizer 2820

The 2820 MSP Turbo™ Vaporizer is a classic system. This model is a great choice for easy to...

Turbo Vaporizer 2801PE

The 2801PE MSP Turbo™ Vaporizer was designed for high flow, expansive vapors, making it a...

Turbo Vaporizer 2800PE

The 2800PE MSP Turbo™ Vaporizer is a great all around vaporizer and works well for most...

Turbo Vaporizer 2800

The 2800 MSP Turbo™ Vaporizer can be operated at temperatures up to 300°C, making it a...