Whether testing for particle size, count, or composition, it is imperative to use reliable particle suspensions to calibrate your surface scanning equipment or particle counters. A particle standard consists of a specific size range and number concentration of solid particles suspended in ultra-pure water (UPW). This suspension is dispersed into clean air or nitrogen and deposited onto wafers and reticles in specific patterns and sizes.
Particle Standards are used to produce high-quality calibration standards for calibrating, qualifying, and monitoring the performance of wafer and photomask inspection systems.
MSP particle suspensions are available in two categories: