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FiltXPO 2023

Oct 09 2023Navy Pier, Chicago, Illinois, US


Designed specifically for leading edge microelectronic applications, the Turbo™ Liquid Flow Controllers 2950V pair with MSP's Turbo II™ Vaporizers to provide unmatched liquid source vapor delivery performance for semiconductor thin film deposition processes (including CVD...

High efficiency filtration down to 2nm and up to 100 SLPM.The VPG-A3 Vapor Process Gas filter is an ultra-low pressure drop, highly-efficient in-line filter designed for vapor and process gas filtration. This patent-protected 316L SS filter, is chemically and thermally...

This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom contamination standards. Manual loading...

This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 30 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom contamination standards. Manual loading...

Vertus® III is a fully automated benchtop system designed for precise and repeatable testing of MDIs, nasal sprays, and nasal aerosols.

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