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Product Selector - Vaporizer
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Product Selector – MSP Vaporization solutions
MSP, a Division of TSI, offers vaporization solutions for a variety of semiconductor/thin film processes. Please answer the questions below to find the equipment that fits your application.
step 1 of 3
Is your application for microelectronics (i.e. CVD for memory, logic, mems, LCD/LED)?
read more
Microelectronic applications tend to have higher precision requirements versus more industrial applications.
Yes
No
Is your liquid flow rate:
read more
As a rough rule of thumb, liquid density is ~1000x that of gas density, so if you need 1000 sccm/min of vapor, 1g/min of liquid may be required.
very low (<2g/min)
low (2g-5g/min)
medium (5g-10g/min)
high (10-50g/min)
extremely high (>50g/min)
How volatile is your liquid (what is the vapor pressure)?
read more
Vapor pressure or equilibrium vapor pressure is defined as the pressure exerted by a vapor in thermodynamic equilibrium with its condensed phases (solid or liquid) at a given temperature in a closed system. The equilibrium vapor pressure is an indication of a liquid's evaporation rate. It relates to the tendency of particles to escape from the liquid (or a solid). A substance with a high vapor pressure at normal temperatures is often referred to as volatile. (Wikipedia)
High vapor pressure/high volatility (like alcohols)
Low vapor pressure/low volatility (like TEMAZr or ethylene glycol)
Moderate vapor pressure/moderate volatility (like water)
I don’t know my liquid’s vapor pressure/volatility
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