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Find the Right Vapor Delivery Solution

for Your CVD or ALD Application

Product Selector – MSP Vaporization solutions

MSP, a Division of TSI, offers vaporization solutions for a variety of semiconductor/thin film processes. Please answer the questions below to find the equipment that fits your application.
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Microelectronic applications tend to have higher precision requirements versus more industrial applications.

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As a rough rule of thumb, liquid density is ~1000x that of gas density, so if you need 1000 sccm/min of vapor, 1g/min of liquid may be required.

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Vapor pressure or equilibrium vapor pressure is defined as the pressure exerted by a vapor in thermodynamic equilibrium with its condensed phases (solid or liquid) at a given temperature in a closed system. The equilibrium vapor pressure is an indication of a liquid's evaporation rate. It relates to the tendency of particles to escape from the liquid (or a solid). A substance with a high vapor pressure at normal temperatures is often referred to as volatile. (Wikipedia)