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Liquid Flow Controller 2950-05V

SKU: 2950-05V

TEOS Full Scale* (g/min): 5
TEMAZr Full Scale (g/min): 0.95
H2O Full Scale (g/min): 3.6
*Nominal max flow determined using TEOS as reference liquid at 23±2°C. Flow rate range is a function of specified liquid.

Product Details

Built upon field proven technology, the MSP Turbo™ Liquid Flow Controller 2950-05V was engineered to pair with MSP Turbo™ Vaporizers to provide a reliable, high-performance liquid vapor delivery solution for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD).

MSP Turbo™ LFC 2950V Specification Snapshot*

Accuracy % F.S. ±1.0
Repeatability % F.S. ±0.4
Linearity % F.S. ±0.6
Response time (s) ~1.0 to ±1% S.P.

Communication Interface:

EtherCAT

RS485

Analog

 

2xRJ45

9-pin D connector (male)

9-pin D connector (male)

*For complete set of specification details download the data sheet or the brochure.

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