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2300 Particle Deposition System


Discontinued MSP, a Division of TSI, Particle Deposition System

*A newer model of this product is now available.

Product Details

Particle size range (DMA) for:

  • PSL Spheres: 80-1000nm/0.08-1.0µm
  • SiO2 Spheres: 80-500nm/0.08-0.5µm

The recommended replacement for this model is the 2300G3M 30nm Particle Deposition System.

Looking to improve overall performance of your surface defect inspection systems? MSP provides certified contamination standards for calibrating, qualifying, and monitoring wafer and reticle/photomask inspection systems.