VPG-A3 Inline Filter

Product Details

Conventional high-purity, point-of-use gas filters are used in a compressed gas line for particle removal. The VPG-A3 filter is also used downstream of a vaporizer under vacuum flow conditions to prevent particles, which could potentially be in the gas/vapor mixture, from entering the Chemical Vapor Deposition (CVD) or Atomic Layer Deposition (ALD) process chamber. The VPG-A3 filter is made from 316L SS sintered powder media and has a large surface area, giving the filter a long lifetime.

Applications

• Vapor process gas
• Ultra-high purity gas
• High temperature
• Inert or reactive gases
• High and ultra-high vacuum
• Semiconductor manufacturing

Features and Benefits

• 316 Stainless Steel
• Large surface area – long life
• Use up to 100 SLPM
• High particle removal efficiency
• Ultra-low pressure drop
• ½” VCR fittings

Patent-protected Design