Turbo Vaporizer 2840PE

商品编号: 2840PE

The 2840PE MSP Turbo™ Vaporizer is one of our smallest vaporizers and has the state-of-the art PE atomizer with on-board flow control. This model has been optimized for low flow applications; featuring an ultra-fast response time making it a great choice for ALD applications.


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*此产品的新型号现已上市。

产品详情

Dimensions

9.6 inch x 3.8 inch x 4.2 inch (244 mm x 97 mm x 107 mm)

Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
Liquid Inlet 1/8 in. VCR female
Vapor Outlet 1/4 in. VCR male
Compressed Air 4 mm instant tube fitting
Wetted Parts SS 316, PEEK, PCTFE, Elgiloy®, FFKM, PTFE
Leak Integrity ≤1 x 10-9 Pa·m3/s (He)
Heater Power Requirements 110 VAC, 60 Hz, 300W
Carrier Gas Inert gas recommended
Max Carrier Gas Flow1 7.0 standard liters/min N2 at 80 psig
4.5 standard liters/min N2 at 50 psig
Max Liquid Flow2 720 g/hr. (TEOS or equivalent)
60 g/hr (H2O or equivalent)
System Pressure Limit 150 psig
Compressed Air 90 to 110 psig
Temperature Range 40°C to 160°C
160°C to 200°C with optional piezo cooling package
Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor 2 Type K thermocouples

Specifications subject to change without notice

1 Max Carrier Gas Flow Rate is adjustable; visit www.tsi.com/contact to request more information.
2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 180° C or higher, N2 carrier gas ≥4.5 SLPM, and pressure <10 Torr immediately downstream of the vaporizer.