You cannot log in without being assigned a valid TSI role.
TEOS Full Scale* (g/min): 1
TEMAZr Full Scale (g/min): 0.19
H2O Full Scale (g/min): 0.73
*Nominal max flow determined using TEOS as reference liquid at 23±2°C. Flow rate range is a function of specified liquid.
Built upon field proven technology, the MSP Turbo™ Liquid Flow Controller 2950-01 was engineered to pair with MSP Turbo™ Vaporizers to provide a reliable, high-performance liquid vapor delivery solution for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD).
9-pin D connector (male)
*For complete set of specification details download the data sheet or the brochure.
Learn more about the MSP Turbo™ LFC 2950