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TEOS Full Scale* (g/min): 0.2
TEMAZr Full Scale (g/min): 0.038
H2O Full Scale (g/min): 0.14
*Nominal max flow determined using TEOS as reference liquid at 23±2°C. Flow rate range is a function of specified liquid.
Built upon field proven technology, the MSP Turbo™ Liquid Flow Controller 2950-02V was engineered to pair with MSP Turbo™ Vaporizers to provide a reliable, high-performance liquid vapor delivery solution for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD).
9-pin D connector (male)
9-pin D connector (male