Cal-Dep Calibration Contamination Standards

MSP, a Division of TSI

*Merci de noter que cette page est disponible en anglais uniquement.*

MSP Cal-Dep™ Calibration Contamination Standards are highly accurate, price-competitive standards built with well-defined, industry-accepted recipes to maintain the performance and productivity of common inspection and metrology tools throughout many years of service.

Calibrating Defect Inspection Equipment

Calibrate your high-throughput inspection system with MSP, a Division of TSI, Cal-Dep™ Calibration Contamination Standards to ensure particle size measurement and capture efficiency performance is maintained throughout the service life. These certified standards for wafer and reticle inspection tools help you to maintain the health of your tools, allowing you to maximize your yield.

Fabricating Electronic Devices

Use Cal-Dep™ Calibration Contamination Standards to calibrate inspection tools in support of statistical process control (SPC) for your manufacturing operations. MSP's particle deposition consistency allows you to use multiple contamination standards to reliably match performance among tools within a single fab and globally among multiple fabs.

SPx Calibration Standards

*Merci de noter que cette page est disponible en anglais uniquement.* MSP's SPx Calibration Standards are precision engineered tools for the calibration, verification and re-qualification of the most common wafer surface inspection systems used in semiconductor manufacturing. These standards play a crucial role in ensuring the accuracy and reliability of inspection equipment, which is essential for maintaining high yields and quality in mature nodes of semiconductor fabrication.

SP3, SP5, and SP7 Wafer Calibration Standards

Built specifically for today's advanced-node inspection requirements. Using SiO2 particle depositions, the SP3, SP5, and SP7 Wafer Calibration Standards push resolution down to 18nm and offer full-wafer, dual-spot, 6-spot, and 8-spot configurations tailored to each inspection platform generation.