Download our latest LFC White paper
Learn more about PID tuning for LFCs
The ever-increasing performance requirements for microelectronic devices are driving higher performance demands for Liquid Flow Controllers (LFCs) used in semiconductor processing. These state-of-the art processes require a high degree of accuracy and repeatability to ensure process recipes produce expected results for deposition rates, film composition and uniformity.
MSP, a Division of TSI, expert Kathy Erickson's new white paper explains the following:
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