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Product Details
| Dimensions |
236 mm x 81 mm x 89 mm (9.3 in. x 3.2 in. x 3.5 in.) |
|
| Fittings (on the unit) | Carrier Gas Inlet | 1/4 in. VCR male split nut |
| Liquid Inlet | 1/8 in. VCR male | |
| Vapor Outlet | 1/4 in. VCR female | |
| Wetted Parts | SS 316, PEEK, PCTFE, Elgiloy®, FFKM, PTFE | |
| Leak Integrity | ≤1 x 10-9 Pa·m3/s Helium | |
| Heater Power Requirements | 220 VAC, 60 Hz, 300W | |
| Carrier Gas | Inert gas recommended | |
| Max. Carrier Gas Flow1 | 3.5 standard liters/min N2 at 80 psig 2.0 standard liters/min N2 at 50 psig |
|
| Max Liquid Flow2 | 60 g/hr (H2O or equivalent) 720 g/hr (TEOS or equivalent) |
|
| Compressed Air | 90 to 110 psig | |
| System Pressure Limit | 150 psig | |
| Temperature Range | 40°C to 160°C 160°C to 200°C with use of air cooling (connections provided) |
|
| Vaporizer Body | Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction | |
| Temperature Sensor | 2 Type K thermocouples | |
Specifications subject to change without notice
1 Max Carrier Gas Flow Rate is adjustable; visit www.tsi.com/contact to request more information.
2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 180° C or higher, N2 carrier gas ≥4.5 SLPM, and pressure <50 Torr immediately downstream of the vaporizer.
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