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Maintaining high purity gases is vital to avoid defects and ensure semiconductor quality. Best practices include real-time monitoring of particles as small as 2 nm and strict regulatory compliance.

Discover how a leading Japanese semiconductor supplier achieved unprecedented cleanliness in their manufacturing processes with TSI's revolutionary Water-based Condensation Particle Counter 3789 (WCPC).

Explores how Direct Liquid Injection (DLI) systems and Fourier Transform Infrared (FTIR) spectroscopy are used to optimize the delivery of high-k dielectric precursors.

Durchflussrate 1 CFM (28,3 L/min) / Partikelgrößen 0,3 bis 25 μm / Integrierte Pumpe

Durchflussrate 28,3 L/min (1 CFM) / Partikelgrößen 0,5 bis 25 μm / Integrierte Pumpe

Wasserbasierte Partikelzähler (Water-Based Condensation Particle Counters, kurz WCPCs) liefern präzise gemessene Konzentrationen gasgetragener Partikel unter Verwendung von umweltfreundlichem, sicherem und überall verfügbarem destilliertem Wasser. In Verbindung mit einem...

MSP’s PRE testing solutions bring academic-level precision to fab-floor challenges, enabling engineers to validate cleaning performance with confidence.

Poor testing can lead to low product quality and revenue loss. Using TSI particle counters enables real-time contamination detection, supporting process optimization and higher manufacturing efficiency.

Durchfluss 2,83 LPM (0,1 CFM) / Kanalgrößenoptionen 0,2 bis 25 μm / Integrierte Pumpe