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Maintaining high purity gases is vital to avoid defects and ensure semiconductor quality. Best practices include real-time monitoring of particles as small as 2 nm and strict regulatory compliance.

Explores how Direct Liquid Injection (DLI) systems and Fourier Transform Infrared (FTIR) spectroscopy are used to optimize the delivery of high-k dielectric precursors.

Durchflussrate 1 CFM (28,3 L/min) / Partikelgrößen 0,3 bis 25 μm / Integrierte Pumpe

Durchflussrate 28,3 L/min (1 CFM) / Partikelgrößen 0,5 bis 25 μm / Integrierte Pumpe

Wasserbasierte Partikelzähler (Water-Based Condensation Particle Counters, kurz WCPCs) liefern präzise gemessene Konzentrationen gasgetragener Partikel unter Verwendung von umweltfreundlichem, sicherem und überall verfügbarem destilliertem Wasser. In Verbindung mit einem...

Poor testing can lead to low product quality and revenue loss. Using TSI particle counters enables real-time contamination detection, supporting process optimization and higher manufacturing efficiency.

Compliance with ISO 14644 standards is essential to control airborne particulate contamination levels.

Durchfluss 2,83 LPM (0,1 CFM) / Kanalgrößenoptionen 0,2 bis 25 μm / Integrierte Pumpe

We offer cutting-edge solutions tailored to the unique (nanoscale) challenges of the semiconductor manufacturing market. With our advanced instrumentation and expertise, we provide critical tools for process control, quality assurance, and cleanroom monitoring. Stay ahead of...