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Explores how Direct Liquid Injection (DLI) systems and Fourier Transform Infrared (FTIR) spectroscopy are used to optimize the delivery of high-k dielectric precursors.

Durchflussrate 2,83 L/min (0,1 CFM)±5% Genauigkeit / Partikelgrößen 0,3 bis 25 µm

MSP's Qual-Dep™ Reticle Qualification Contamination Standards are specifically designed to meet your exact tool qualification needs, providing reliable solutions for validating and aligning reticle inspection systems to ensure optimal performance and minimize risks in...

Durchflussrate 28,3L/min (1,0 CFM)±5% Genauigkeit / Partikelgrößen 0,100 to 10,0 µm

Poor testing can lead to low product quality and revenue loss. Using TSI particle counters enables real-time contamination detection, supporting process optimization and higher manufacturing efficiency.

Wasserbasierte Partikelzähler (Water-Based Condensation Particle Counters, kurz WCPCs) liefern präzise gemessene Konzentrationen gasgetragener Partikel unter Verwendung von umweltfreundlichem, sicherem und überall verfügbarem destilliertem Wasser. In Verbindung mit einem...

Durchflussrate 1 CFM (28,3 L/min) / Partikelgrößen 0,3 bis 25 μm / Integrierte Pumpe

MSP’s PRE testing solutions bring academic-level precision to fab-floor challenges, enabling engineers to validate cleaning performance with confidence.

Durchflussrate 28,3 L/min (1 CFM) / Partikelgrößen 0,5 bis 25 μm / Integrierte Pumpe

Compliance with ISO 14644 standards is essential to control airborne particulate contamination levels.