AVS 25th International Conference on Atomic Layer Deposition (ALD 2025)

MSP, a Division of TSI®, is excited to support the ALD and ALE community during ALD 2025 / ALE 2025. While we won’t have a formal booth, you'll find our literature stand at the event — and more importantly, Andrea Geer will be available between sessions to answer questions and share insights on MSP’s latest vaporization and delivery technologies.

Presentation Highlight

Don’t miss Andrea Geer’s presentation:
"From the Research Lab to the Fab: Comparison of Bubbler and Direct Liquid Injection Vapor Delivery Systems"
As semiconductor processes advance, achieving high-throughput, stable vapor delivery becomes increasingly critical. Andrea will compare the performance of traditional bubblers and direct liquid injection (DLI) vaporizers for difficult-to-vaporize precursors, using real-time FTIR spectroscopy to assess vapor concentration and quality. The talk will explore hardware setups, control criteria, and practical advantages of DLI for scaling from lab research to high-volume manufacturing.

Explore Better Vaporization

Discover how MSP’s Turbo II™ Vaporizers and mass delivery systems help improve vapor stability, enable precise dosing, and handle even low vapor pressure or thermally sensitive liquids. Learn about contactless direct liquid injection and efficient vapor delivery designed to enhance process control and flexibility.

Connect with Us

If you're curious about how these technologies can enhance your ALD or ALE processes, stop by our literature stand and connect with Andrea Geer between the sessions.

Can't wait until the event? Connect with us online to stay updated on the latest news, product releases, and industry insights from MSP, a Division of TSI®. Follow us on LinkedIn for real-time updates and exclusive content.

Join us to see how our solutions can elevate your research and applications!

More About Vapor Delivery for CVD and ALD