Particle Deposition Systems

MSP’s Particle Deposition System sets industry standards for wafer inspection and metrology, supporting high yields in advanced device manufacturing. This system precisely and consistently deposits PSL spheres, NanoSilica™ Size Standards, and SiO2 particles, creating contamination standards with SI traceability for wafer inspection calibration. It also deposits particles from MSP Process Particles™ Suspensions, enabling accurate material characterization for inspection tool response to defects.

Produkte

Auto-Load 20 nm Particle Deposition System 2300G3A - 20 nm

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Manual-Load 20 nm Particle Deposition System 2300G3M - 20nm

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Auto-Load 10 nm Particle Deposition System 2300G3A - 10 nm

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Manual-Load 10 nm Particle Deposition System 2300G3M - 10 nm

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Manual-Load 30 nm Particle Deposition System 2300G3M – 30nm

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Reliable particle deposition is essential for high-quality microscopy and chemical analysis. Particle deposition systems enable researchers to deliver aerosols to substrates in a controlled, repeatable manner, producing samples that support confident interpretation. Whether the goal is a sparse distribution for single-particle analysis or uniform loading for averaged measurements, these systems provide the precision and flexibility needed in modern labs.

Key features:

  • Method flexibility: Support electrostatic precipitation, inertial impaction, or flow-directed deposition to match particle size and material properties.
  • Precise control: Adjust flow rate, deposition time, and, where applicable, electric field strength to tune areal density and spot morphology.
  • Substrate compatibility: Prepare TEM grids, filters, wafers, coupons, and functional surfaces used in materials and life-science research.
  • Integration: Connect upstream to classifiers and sizers (e.g., SMPS) or generators to produce size-selected, compositionally uniform samples.

Common applications:

  • Electron microscopy sample preparation, including nanomaterial and catalyst studies.
  • Spectroscopy and mass spectrometry where controlled loading aids quantitation.
  • Filter media evaluation and calibration routines.
  • Surface functionalization and materials development research.
  • Toxicology research where reproducible exposures support dose-response studies.

Implementation guidance:

  • Define target particle size distribution and desired areal density before selecting the method.
  • Validate deposition uniformity with imaging or optical methods and refine parameters accordingly.
  • Use consistent substrates and conditioning to help minimize variability.
  • Document recipes and instrument parameters to support cross-team reproducibility and publication.

Particle deposition systems help teams translate aerosol streams into high-quality samples, reducing rework, speeding analysis, and strengthening the link between particle characterization and downstream measurement techniques.


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