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Product Details
This thermal Liquid Flow Controller (LFC) is designed to work with the MSP ‘PE’ series Turbo-Vaporizers. The 2940 LFC is comprised of a thermal sensor to sense the mass flow rate of the liquid and generate a voltage to operate the piezoelectric control valve in the ‘PE’ series Turbo-Vaporizers. The 2940 features a fast response time making it a good choice for short duration vapor pulses frequently used in ALD or short pulse CVD. The 2940 features zoned ‘PID’ settings and a self-learning function for improved control.
| Model | 2940 Liquid Flow Controller FC1 |
|---|---|
| Full Scale TEOS Equiv (g/min) | 0.58 |
| Full Scale DI Water (g/min) | 0.08 |
| Overpressure Resistance (bar) | 5 |
| Max Pressure Drop (mbar) | 5 |
| Capillary Inner Diameter (mm) | 0.48 |
| Power @ 24V (W) | 48 |
| Port Connectors | 1/8 inch Male CVR Fitting |
| Operating Temperature (ºC) | 0–50 |
| Operating Humidity (%) | 20–80 non-condensing |
| Wetted Materials | Quartz Glass/PEEK/SS316/Viton/Silicon RTV |
| Dimensions (mm/incjes) | 127 x 152 x 25 / 5 x 6 x 1 |
| Weight (kg/lb) | 0.45/1.0 |
| Ambient Storage Temperature (ºC) | -10–60 |
| Mounting Slots | Four slots 0.15 inches wide on a 4.75 inch x 0.75 inch pattern |
| Communications Pinout | |
|---|---|
| Pin | Function |
| 1 | +24V |
| 2 | Set-point (0–5V) |
| 3 | Monitor (0–5V) |
| 4 | RXD |
| 5 | TXD |
| 6,7,8,9 | Ground |
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