2940 FC1 Liquid Flow Controller

UGS: 2940-01-1004

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Precision control of an external Piezo valve with full scale (TEOS equivalent) of 580 mg/min

Discontinué

Remplacement recommandé

Un nouveau modèle de ce produit est maintenant disponible.

Product Details

This thermal Liquid Flow Controller (LFC) is designed to work with the MSP ‘PE’ series Turbo-Vaporizers. The 2940 LFC is comprised of a thermal sensor to sense the mass flow rate of the liquid and generate a voltage to operate the piezoelectric control valve in the ‘PE’ series Turbo-Vaporizers. The 2940 features a fast response time making it a good choice for short duration vapor pulses frequently used in ALD or short pulse CVD. The 2940 features zoned ‘PID’ settings and a self-learning function for improved control.

Model	2940 Liquid Flow Controller FC1
Full Scale TEOS Equiv (g/min)	0.58
Full Scale DI Water (g/min)	0.08
Overpressure Resistance (bar)	5
Max Pressure Drop (mbar)	5
Capillary Inner Diameter (mm)	0.48
Power @ 24V (W)	48
Port Connectors	1/8 inch Male CVR Fitting
Operating Temperature (ºC)	0–50
Operating Humidity (%)	20–80 non-condensing
Wetted Materials	Quartz Glass/PEEK/SS316/Viton/Silicon RTV
Dimensions (mm/incjes)	127 x 152 x 25 / 5 x 6 x 1
Weight (kg/lb)	0.45/1.0
Ambient Storage Temperature (ºC)	-10–60
Mounting Slots	Four slots 0.15 inches wide on a 4.75 inch x 0.75 inch pattern