High-Efficiency Vapor Process Gas Filters for ALD and CVD Applications

MSP Vapor Process Gas (VPG) filters are designed for high-efficiency particle removal in ALD and CVD processes. With ultra-high filtration efficiency down to 2 nm and extremely low pressure drop, VPG Filters help protect critical processes while supporting consistent gas flow and throughput.

Request the Whitepaper

Learn how VPG filter technology addresses nanoparticle contamination in vapor process gas applications.
 

Protect Critical ALD and CVD Processes

Nanoparticle contamination can affect process performance, yield, and product quality. VPG Filters combine advanced nano-filtration media with a cross-flow design to capture particles efficiently while minimizing pressure drop.

Ultra-High Efficiency - 99.9999999999% particle removal at 2 nm helps capture nanoparticles before they reach critical process equipment.

Extremely Low Pressure Drop - Minimize pressure loss across the filter to help maintain process conditions and reduce the risk of condensation or gas-phase conversion.

High Thermal Mass - The filter's high thermal mass can act as a second-stage heat exchanger, supporting stable process conditions.

Durable 316L Stainless Steel - 316L stainless steel construction provides strong chemical and thermal resistance for demanding vapor process environments.
 

How VPG Filtration Works --- Cross-Flow Design

The VPG Filter's cross-flow design provides lower face velocity, enabling high particle-capture efficiency without excessive pressure drop.

This combination helps address one of the key challenges in vapor process gas filtration: removing nanoscale particles without introducing unnecessary resistance into the gas delivery system.
 

Designed for Demanding Vapor Process Applications

• Ultra-high efficiency down to 2 nm
• 99.9999999999% particle removal at 2 nm
• Extremely low pressure drop
• Cross-flow filter design
• High thermal mass
• 316L stainless steel construction
• High chemical and thermal resistance


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See What VPG Filters Can Do for Your Process

Download the whitepaper to explore the technology behind high-efficiency vapor process gas filtration—or connect with an MSP expert to discuss your ALD or CVD application.