High-Efficiency Vapor Process Gas Filters for ALD and CVD Applications

MSP’s Vapor Process Gas (VPG) filters are designed for high-efficiency particle removal in CVD and ALD processes, delivering ultra-low pressure drop and consistent performance.

Eliminate Nanoparticle Contamination in ALD/CVD Without Sacrificing Throughput

Ultra-High Efficiency – Achieve 99.9999999999% particle removal at 2 nm for precise control.

Low Pressure Drop – Minimize pressure loss and avoid disruptions in ultra-low pressure environments.

Durability & Chemical Resistance – Made with 316 stainless steel, ensuring long filter life in extreme conditions.

Superior Nano-Filtration – Our nano-filtration media delivers unmatched filtration efficiency and pressure drop capabilities.

Contact Us to Learn How VPG Filters Improve Your CVD and ALD Processes