液体流量控制器

Liquid Flow Controllers modulate how much liquid enters a vaporizer, and in turn regulate the concentration of the vapor.

Our PE MSP Turbo™ Vaporizers use a precision Piezo-valve to control the rate of liquid flow to the vaporizer, significantly reducing dead volume and improving response time.

Find your Liquid Flow Controller

Use our interactive product selector to find the right vapor delivery solution for your CVD thin film application.

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Fast Response Time. Self-Learning. Zoned Pid Values. Flexible Solutions.

MSP’s versatile Liquid Flow Controller can be used to control the on-board Piezo valve in PE vaporizers. It can maintain a steady liquid flow, or generate repeatable short duration vapor pulses for ALD (atomic layer deposition) applications.

Key Features and Benefits:

• Supports Zoned PID settings
• Has a self-learning function to optimize control
• Response time of < 200 ms
• 3 models that cover a liquid flow rate range from 0.08g/min (H₂O) to 32 g/min (TEOS)
   

Filters are an important part of reducing CVD defects

Learn more by downloading our white paper on reducing CVD defects with post-vaporization filtration

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