NanoSilica Size Standards are available in 26 nominal sizes ranging from 15 to 200 nm, with size distributions narrower than commercially available PSL spheres. They’re provided in 5-mL quantities in dropper-tip bottles for convenience when mixing suspensions. All NanoSilica standards come with a Certificate of Calibration and Traceability and a Safety Data Sheet with handling and disposal instructions.
Silica is the material of choice for calibrating high-sensitivity inspection systems with intense DUV light sources because they are stable under exposure to DUV radiation. PSL (polystyrene latex) absorbs DUV radiation and volatilizes, so PSL spheres shrink upon inspection.
While our NanoSilica Size Standards are well suited for use in MSP Particle Deposition Systems and other particle deposition tools, they’re also excellent for calibrating DMAs, optical (laser) particle counters and other particle instruments. With a lower refractive index than PSL, they’re more representative of real-world particles.
Features and Benefits
- Extremely uniform size distribution
- Modal diameter measured with SI traceability
- Symmetric size distributions
- Stable when subjected to intense DUV radiation
- High particle number concentration
- Easy to use
- Stable dilutions
Applications
- Wafer and reticle (photomask) inspection tool calibration
- Inspection tool development and qualification
- Incoming bare wafer inspection/qualification
- Blanket film monitoring
- Incoming reticle (photomask) inspection/qualification
- Production reticle (photomask) monitoring
- Process tool qualification and monitoring
- Particle counter calibration
| Model | Description | Certified Modal Diameter [nm] | Approx. Size Dist. Width, RFW HM |
|---|---|---|---|
| 2260-02-1044 | NS-0015A 15 nm 5 mL | 14-16 | 13% |
| 2260-02-1046 | NS-0018A 18 nm 5 mL | 17-19 | 12% |
| 2260-02-1047 | NS-0020A 20 nm 5 mL | 19-21 | 11% |
| 2260-02-1048 | NS-0024A 24 nm 5 mL | 23-25 | 10% |
| 2260-02-1075 | NS-0027A 27 nm 5 mL | 26-28 | 9% |
| 2260-02-1049 | NS-0030A 30 nm 5 mL | 29-31 | 8% |
| 2260-02-1079 | NS-0032A 32 nm 5 mL | 31-33 | 7% |
| 2260-02-1062 | NS-0035A 35 nm 5 mL | 34-36 | 6% |
| 2260-02-1076 | NS-0037A 37 nm 5 mL | 36-38 | 6% |
| 2260-02-1051 | NS-0040A 40 nm 5 mL | 39-41 | 6% |
| 2260-02-1063 | NS-0045A 45 nm 5 mL | 44-46 | 5% |
| 2260-02-1052 | NS-0050A 50 nm 5 mL | 49-51 | 5% |
| 2260-02-1077 | NS-0055A 55 nm 5 mL | 53-57 | 5% |
| 2260-02-1053 | NS-0060A 60 nm 5 mL | 58-62 | 4% |
| 2260-02-1067 | NS-0064A 64 nm 5 mL | 63-65 | 4% |
| 2260-02-1054 | NS-0070A 70 nm 5 mL | 68-72 | 4% |
| 2260-02-1068 | NS-0074A 74 nm 5 mL | 73-75 | 4% |
| 2260-02-1055 | NS-0080A 80 nm 5 mL | 78-82 | 4% |
| 2260-02-1069 | NS-0084A 84 nm 5 mL | 83-85 | 4% |
| 2260-02-1057 | NS-0090A 90 nm 5 mL | 88-92 | 4% |
| 2260-02-1070 | NS-0094A 9 4nm 5 mL | 93-95 | 4% |
| 2260-02-1058 | NS-0100A 100 nm 5 mL | 95-105 | 4% |
| 2260-02-1071 | NS-0104A 104 nm 5 mL | 102-106 | 4% |
| 2260-02-1059 | NS-0125A 125 nm 5 mL | 120-130 | 4% |
| 2260-02-1060 | NS-0150A 150 nm 5 mL | 145-155 | 4% |
| 2260-02-1061 | NS-0200A 200 nm 5 mL | 190-210 | 4% |
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