粒子沉积系统

MSP的粒子沉积系统为晶圆检测与计量树立了行业标杆，助力先进器件制造实现高良率。该系统精准稳定地沉积PSL球体、NanoSilica™粒径标准及SiO2粒子，可生成具有国际单位制溯源性的污染标准，用于晶圆检测校准。它还沉积来自MSP Process Particles™悬浮液的粒子，为检测工具对缺陷的响应提供精确的材料特性分析。

产品

Auto-Load 20 nm Particle Deposition System 2300G3A - 20 nm

This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 20 nm...

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Manual-Load 20 nm Particle Deposition System 2300G3M - 20nm

This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 20 nm...

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Auto-Load 10 nm Particle Deposition System 2300G3A - 10 nm

This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 10 nm...

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Manual-Load 10 nm Particle Deposition System 2300G3M - 10 nm

This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 10 nm...

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Manual-Load 30 nm Particle Deposition System 2300G3M – 30nm

This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 30 nm...

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