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Built specifically for today's advanced-node inspection requirements. Using SiO2 particle depositions, the SP3, SP5, and SP7 Wafer Calibration Standards push resolution down to 18nm and offer full-wafer, dual-spot, 6-spot, and 8-spot configurations tailored to each inspection...

Air Sampling Harness

Rubber Boot For Flow Detective

Power supply for 5-Way Docking Station for Apex2 and Flow Detective Pumps 

Apex2IS 5-Way Docking Station only. 

VAPex Nozzles (pkt 5)

Core Module for TSI OmniTrak™ Solution consists of PM, CO₂, VOC-EC (ppb), Temperature, Relative Humidity (RH), and Barometric Pressure (BP). This product is only available in the US, Canada, United Kingdom, European Union, Switzerland, Norway, and Australia. 

The TSI QualityGuard service plans are designed to ensure your instruments are properly calibrated and at peak performance.