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Product Details
Built upon field proven technology, the MSP Turbo™ Liquid Flow Controller 2950-10 was engineered to pair with MSP Turbo™ Vaporizers to provide a reliable, high-performance liquid vapor delivery solution for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD).
MSP Turbo™ LFC 2950 Specification Snapshot*
| Accuracy % F.S. | ±1.0 |
|---|---|
| Repeatability % F.S. | ±0.4 |
| Linearity % F.S. | ±0.6 |
| Response time (s) | ~0.3 to ±1% S.P. |
|
Communication Interface: EtherCAT RS485 Analog |
2xRJ45 9-pin D connector (male) 9-pin D connector (male) |
*For complete set of specification details download the data sheet or the brochure.
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