New White Paper From MSP Semiconductor Experts

The ever-increasing performance requirements for microelectronic devices are driving higher performance demands for Liquid Flow Controllers (LFCs) used in semiconductor processing. These state-of-the art processes require a high degree of accuracy and repeatability to ensure process recipes produce expected results for deposition rates, film composition and uniformity.

MSP, a Division of TSI, expert Kathy Erickson's new white paper explains the following:

• Higher Requirements for Liquid Flow Controllers in Advanced Semiconductor Manufacturing
  • Importance of Fast Response/Stabilization Times
• Types of Liquid Flow Controllers
  • Coriolis
  • Thermal
  • Differential Pressure
• How LFC Selection and PID Tuning Optimization Can
  • Reduce Processing Times
  • Reduce Liquid Waste
  • Reduce Cost of Ownership
• PID Basics
  • PID Parameters Defined 
  • PID Zones
  • Bias/Offset Values
  • Bias/Offset Methods
• PID Tuning Methods and Advanced Techniques
• And more!

 

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