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Direct Liquid Injection and High-K Dielectrics
2024/8/13

Understanding Direct Liquid Injection and High-K Dielectrics in Semiconductor Technology

High-k dielectrics, vital for semiconductor devices, face delivery challenges due to low vapor pressure and thermal sensitivity. Direct Liquid Injection (DLI) systems improve vaporization, while Fourier Transform Infrared (FTIR) spectroscopy ensures efficient delivery by monitoring vapor and droplet content. This combination optimizes deposition, enhancing device performance and yield.

Key changes in USP <601> and how MSP, a Division of TSI®, can assist
2024/8/13

Navigating the 2024 Changes in USP <601>: How MSP Can Support Your Compliance

The 2024 updates to USP <601> require two-way solenoid valves for all OINDPs and set new performance standards for vacuum pumps. MSP, a Division of TSI®, offers advanced solutions like the TPK 100i and BAC 100i to meet these guidelines. Their equipment provides precise control and integrates easily into existing systems, with expert support available to ensure compliance and accuracy.