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Featured Product
High-Flow Turbo II Vaporizer 2855PE
MSP 是 TSI® 的子公司，提供全新系列的蒸发器，用于气相加工中的液体源蒸发，例如半导体设备制造中的化学气相沉积 (CVD) 和原子层沉积 (ALD)。
Liquid Flow Controllers
Reliable, high-performance liquid vapor delivery for CVD and ALD.
View ProductsLiquid Particle Instrument
Down to 10 nm particle detection in ultra-pure water (UPW).
View ProductsParticle Deposition Systems
Producing wafer contamination standards for inspection and quality.
View ProductsParticle Size Standards
For accurate calibration of wafer and photomask inspection systems.
View ProductsVapor Process Gas (VPG) Filters
Removes nanometer and micrometer particles from the gas/vapor mixture.
View ProductsWafer and Reticle Contamination Standards
For consistent and repeatable particle size and count control.
View Products
With our expertise and innovative solutions, TSI and MSP position electronics manufacturers to overcome challenges and achieve success in their operations.
TSI instruments enable precise particle measurement, detecting particles as small as 2 nm, providing reliable data to address critical industry challenges and minimize process risks.
MSP's Vaporizers facilitate consistent thin film deposition, reducing defects and enabling enhanced processes.
Additionally, MSP provides contamination standards for calibration, traceable to NIST, deposited on various substrates to calibrate inspection systems. Our Particle Deposition Systems can deposit particles as small as 10 nm, enhancing semiconductor inspection tool calibration.
Together, TSI and MSP equip manufacturers with the tools and expertise to overcome obstacles and excel in their operations.
