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洁净室监测
尘埃粒子污染监测,以满足洁净室审核。
CMP Slurry Characterization
Abrasive particle sizing beyond conventional optical measurement methods.
Gas and Liquid Filtration
Maintaining the cleanliness of distribution lines leading to the production processes.
零部件清洁度测试
精确的清洁度测试对电子产品至关重要。
高纯度气体中的粒子检测
通过监测气体中的颗粒物以防止电子缺陷。
Thin Film Deposition & Removal
Vapor delivery solutions for ALD and CVD.
Surface Defect Inspection
Detect and mitigate killer defects in electronics.
Ultrapure Water Monitoring
Nanoparticle detection down to 10 nm.