AeroTrak™ 9001 Cleanroom Condensation Particle Counter (CPC)

10 nm Measurement Like No Other. 

The AeroTrak™ 9001 Cleanroom CPC is specifically designed for ultra-clean semiconductor manufacturing providing incredibly low false-counts and real-time 10 nm sensitivity nanoparticle detection at a 0.1 cfm flow rate for detecting particles in the air or inert pressurized gases—something 0.1 µm particle counting instruments cannot.

Public Resources

• Product Web Page > View

• Product Specification Sheet >  View US   | View A4

• Application Note — Comparison of Cleanroom CPC Working Fluids > View US  | View A4

• Video — Instrument Introduction > View

• Video Demo — Nanoparticle Detection for Semiconductor Fabrication Using TSI AeroTrak 9001 Cleanroom CPC > View

Confidential Resources

• Instrument Manual > View

• Quick Start Guide > View

• Pump Priming Tool Instructions (Automated and Manual Pump Priming Procedure) > View

• Firmware v5.2 Release > View signed release note | Download exe files

• Webinar Recording — Troubleshooting the AeroTrak 9001 Cleanroom CPC > View

View complete TSI solution for Contamination Control for Monitoring Ultra-Clean Semiconductor Environments.