TSI - MSP, a Division of TSI

MSP Earns a Minnesota Safety Council Governor’s Workplace Safety Award

MSP, a Division of TSI®, has been recognized for excellence in workplace safety and health. MSP is amongst 200 employers to be honored through the awards program, coordinated by the Minnesota Safety Council.

Validating Wafer Cleaning Efficiency with Particle Removal Efficiency (PRE) Testing

Learn how MSP PRE Challenge Wafers can help you optimize your cleaning processes and boost yield. Ensure peak wafer cleaning performance with PRE Challenge Wafers!

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Supporting the Shift to Next-Generation Propellants

Facing the shift to low-GWP inhaler propellants? Learn how new formulations challenge performance—and how MSP’s testing solutions help you stay compliant, precise, and ready for what’s next.

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Finding the Right-sized Vaporization Solution

MSP’s Turbo II™ Vaporizer helped a CVD OEM double output and cut defects - boosting yield, efficiency, and customer satisfaction in tight gas box spaces.

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Enriching Lives by Improving Health & Productivity

MSP, a Division of TSI®, provides advanced solutions for pharmaceutical inhaler testing, thin-film deposition, and surface defect inspection in semiconductor manufacturing.

Since joining TSI in 2016, MSP has continued to deliver innovative, high-performance tools that improve processes, product quality, and efficiency across industries.

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Pharmaceuticals
Semiconductor

Market

Pharmaceutical Manufacturing

MSP supports key segments of the life sciences market, particularly in pharmaceutical manufacturing. Our solutions are tailored to meet the needs of pharmaceutical manufacturers and regulatory compliance labs. We deliver precision instrumentation and automated systems tailored to help with:

Aerodynamic Particle Size Distribution (APSD) - Helping ensure inhaler drugs reach the target area in the lungs effectively
Delivered Dose Uniformity (DDU) - Supporting precise and consistent medication delivery
In Vitro In Vivo Correlation (IVIVC) - Testing to real-world drug behavior, aiding efficient drug development

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MSP's Pharmaceuticals Inhaler Device Testing

Market

Semiconductor Manufacturing

Semiconductor manufacturers demand precise instrumentation to ensure the integrity and efficiency of their production processes and ultimately improve yield. MSP, a Division of TSI®, supports the semiconductor industry with innovative solutions for vapor delivery in CVD and ALD as well as surface defect inspection and metrology. Our instruments and services contain:

MSP's Turbo II™ vaporizers, vapor/gas filters, and liquid flow controllers to ensure precise vapor delivery, high-quality thin films, and increased wafer yields
Trusted particle deposition systems, certified contamination standards, and reliable particle suspensions to calibrate and optimize wafer/reticle inspection tools and wafer/mask cleaning equipment

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MSP Pharmaceutical Products

We provide regulatory-compliant solutions for inhaler device testing and drug delivery characterization. As a co-developer of the NGI, MSP offers trusted tools for APSD, DDU, and IVIVC testing. In partnership with Copley Scientific, we deliver complete, automated systems for MDIs, DPIs, and nebulizers, helping labs achieve consistent, high-quality results with improved efficiency.

NGI and NGI Plus

Flow Controllers

Inhaler Testing Automation and Lab Organization

In Vitro – In Vivo Correlation IVIVC Equipment

Abbreviated Impactor Measurement (AIM) Equipment

Generic Drug Development Equipment

MSP Vaporizer Products

We are a leading provider of advanced vapor delivery solutions for semiconductor manufacturing processes such as Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD). We offer a comprehensive portfolio that includes:

Vaporizers

Vapor Process Gas (VPG) Filters

Liquid Flow Controllers

MSP Metrology Products

From equipment to calibration materials, MSP delivers the tools you need to develop, validate, and monitor your surface inspection systems with confidence.

The 2300G3 Particle Deposition System sets the standard for wafer inspection tool calibration, helping boost yield and reliability. We offer certified Wafer and Reticle Contamination Standards, reliable particle suspensions, and NanoSilica™ size standards to calibrate and qualify inspection systems with precision.

Particle Deposition Systems

Particle Size Standards

Wafer & Reticle Contamination Standards

PRE Challenge Wafers and Photomasks

About MSP, a Division of TSI®

The company is known worldwide for deep expertise in developing unique equipment for aerosol research, pharmaceutical inhaler testing, thin-film deposition in semiconductor device fabrication, and contamination control applications.

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